I already ran sfc /scannow but this didn't help.
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The virtual machine 'Ubuntu Server' has terminated unexpectedly during startup with exit code 1 (0x1). More details may be available in '...\VBoxHardening.log'.
Fehlercode:E_FAIL (0x80004005)
Komponente:MachineWrap
Interface:IMachine {85cd948e-a71f-4289-281e-0ca7ad48cd89}
Edit: I'm on Windows 7, running VirtualBox 5.2.6